Is FURUYA DENKI an authorized Brooks Instrument distributor?

No. FURUYA DENKI is an independent supplier and uses brand names for product identification only.

What Brooks Instrument information is needed for RFQ?

Send model, quantity, country, urgency, application notes, and nameplate photos where available.

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Brooks Instrument Products & Sourcing

Industrial automation components, obsolete parts and technically reviewed alternatives.

Brand overview

Brooks Instrument is a U.S. manufacturer specializing in precision flow and pressure measurement and control technology. Its product portfolio includes gas and liquid mass flow controllers, mass flow meters, pressure controllers, pressure measurement instruments, vacuum measurement products, vapor delivery systems and variable area flow meters. Key mass flow product families include SLA5800, SLAMF, GF100, GF080 and AMF. Brooks Instrument products are widely used in semiconductor manufacturing, chemical processing, laboratory equipment, bioprocessing and industrial automation.

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About Brooks Instrument

Brooks Instrument is a U.S.-based manufacturer specializing in precision flow, pressure and process measurement and control technology.

The company provides a broad range of mass flow controllers, mass flow meters, pressure control instruments, vacuum measurement products and fluid handling solutions for semiconductor, chemical, life science, laboratory and industrial applications.

Main Product Categories

• Gas Mass Flow Controllers

• Gas Mass Flow Meters

• Liquid Mass Flow Controllers

• Liquid Mass Flow Meters

• Thermal Mass Flow Instruments

• Coriolis Mass Flow Instruments

• Pressure-Based Mass Flow Controllers

• Pressure Controllers

• Pressure Measurement Instruments

• Vacuum Measurement Products

• Variable Area Flow Meters

• Vapor Delivery Systems

• Flow Accessories and Software

SLA5800 Series

The SLA5800 series includes thermal mass flow controllers and meters designed for accurate and repeatable gas flow measurement and control.

The series is suitable for laboratory, industrial and process applications and supports multiple flow ranges and communication options.

SLAMF Series

The SLAMF series is designed for demanding environments where protection against moisture, dust and harsh operating conditions is required.

It combines precise thermal mass flow measurement and control with a rugged enclosure for industrial and process applications.

GF Series

The GF100 and GF080 series are metal-sealed mass flow controllers and meters developed for high-purity and demanding gas applications.

These products are commonly used in semiconductor process equipment and other systems requiring precise and stable gas delivery.

AMF Series

The AMF series provides compact thermal mass flow control for gas applications where accurate flow regulation and space-efficient installation are required.

Flow Measurement Technologies

Brooks Instrument offers multiple measurement technologies including:

• Thermal mass flow

• Coriolis mass flow

• Pressure-based flow control

• Variable area flow measurement

Typical Applications

Brooks Instrument products are commonly used in:

• Semiconductor manufacturing

• Chemical and petrochemical processes

• Gas delivery systems

• Laboratory equipment

• Research and development

• Bioprocessing

• Pharmaceutical equipment

• OEM machinery

• Industrial automation

• Process control

• Vacuum systems

• Advanced materials processing

• Equipment testing and calibration

Ordering Information

Brooks Instrument products are available in multiple configurations depending on the medium, flow range, pressure, process connection, seal material, valve type, communication interface and application environment.

Please provide the complete model number, part number, gas or liquid type, flow range, operating pressure and technical requirements when requesting a quotation.

Availability, specifications, documentation and lead time are subject to confirmation at the time of quotation.

Brand summary

Brooks Instrument is a U.S. manufacturer specializing in precision flow and pressure measurement and control. Its portfolio includes gas and liquid mass flow controllers, mass flow meters, pressure controllers, vacuum instruments and vapor delivery products. Key mass flow families include SLA5800, SLAMF, GF100, GF080 and AMF. Brooks products are widely used in semiconductor manufacturing, chemical processing, laboratories, bioprocessing and industrial automation.

Brooks Instrument products

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FAQ

Can FURUYA DENKI supply discontinued models?

Yes, after model suffix and condition confirmation. Availability depends on global sourcing results.

Is FURUYA DENKI an authorized distributor?

No. FURUYA DENKI is an independent supplier and does not claim authorization.

Can you provide datasheets and certificates?

We can share available documents after model, lot and supply condition checks.

What information is needed for a quote?

Brand, model, quantity, country, urgency, application, and nameplate photos where available.

FURUYA DENKI is an independent supplier and is not affiliated with or authorized by the brands shown on this page. Brand names, trademarks and part numbers are used for identification only. Availability, specifications, condition, origin, documentation, lead time and warranty are subject to our formal quotation. Please verify all technical requirements before ordering. Images are for reference only.