About HORIBA
HORIBA is a Japan-based manufacturer specializing in measurement, analysis and control technologies for semiconductor, scientific, environmental, automotive and industrial applications.
Within its semiconductor fluid control business, HORIBA provides a wide range of mass flow controllers, mass flow meters and process gas control instruments for precise gas delivery and process control.
Main Product Categories
• Gas Mass Flow Controllers
• Gas Mass Flow Meters
• Digital Mass Flow Controllers
• Multi-Gas / Multi-Range Mass Flow Controllers
• Pressure-Insensitive Mass Flow Controllers
• High-Temperature Mass Flow Controllers
• Process Gas Flow Control Products
• Semiconductor Fluid Control Instruments
SEC-Z Series
The SEC-Z series includes advanced digital mass flow controllers designed for high-accuracy gas control.
Models such as the SEC-Z500X series support multi-gas and multi-range operation, allowing users to change gas type or full-scale flow settings according to process requirements.
SEC-N Series
The SEC-N series is a digital mass flow controller family developed for a wide range of industrial and semiconductor applications.
It supports multiple communication interfaces and a broad flow range, making it suitable for integration into automated process equipment.
SEC-E Series
The SEC-E series is a general-purpose mass flow controller using a thermal sensor and solenoid valve for gas flow measurement and control.
It is suitable for applications including semiconductor equipment, coating systems, photovoltaic manufacturing and other industrial production systems.
SEC-8000 Series
The SEC-8000 F/D/E series is designed for high-temperature gas flow control applications.
These digital mass flow controllers are suitable for processes where elevated operating temperature and stable gas delivery are required.
Typical Applications
HORIBA mass flow control products are commonly used in:
• Semiconductor manufacturing
• Thin-film deposition
• Process gas delivery systems
• CVD and related gas processes
• Industrial gas control
• Research and laboratory equipment
• Equipment testing
• OEM process systems
• Display and photovoltaic manufacturing
• Power semiconductor production
Ordering Information
HORIBA SEC mass flow controllers are available in multiple configurations depending on the gas type, flow range, pressure, process connection, valve design, operating temperature and communication interface.
Please provide the complete model number, part number, gas type, flow range and technical requirements when requesting a quotation.
Availability, specifications, documentation and lead time are subject to confirmation at the time of quotation.
